atomic layer deposition

  1. Home
  2. top of the aat hierarchies
  3. Activities Facet
  4. Processes and Techniques (hierarchy name)
  5. [processes and techniques by specific type]
  6. [additive and joining processes and techniques]
  7. [surface covering processes and techniques]
  8. coating (process)
  9. atomic layer deposition
Scope note
A technique for depositing a film onto a surface in monolayers by utilizing a self-limiting chemical reaction. It is a vapor phase technique capable of producing thin films of a variety of materials.
atomic layer deposition
Accepted term: 10-Feb-2025