Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. mass spectrometry

Anotations

Scope note:

A surface analysis technique which measures the elastically scattered ion created when a primary ion beam is directed at the sample surface. The kinetic energy of the reflected primary ion depends on the mass of the surface atom involved in scattering, thus revealing information about the sample surface.