Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. spectroscopy
7. emission spectroscopy

Anotations

Scope note:

Sensitive surface analytical technique that measures secondary electrons excited by an incident electron beam. This technique is used to determine elemental composition of the top few nanometers of solid, electrically conductive materials.