<?xml version="1.0" encoding="utf-8"?><mads xmlns="http://www.loc.gov/mads/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/mads/
mads.xsd"><authority><topic authority="http://AATesaurus.cultura.gencat.cat/aat/getty_en">micro x-ray fluorescence</topic></authority><related type="broader"><topic>spectroscopy</topic></related><variant type="other"><topic>fluorescence, micro x-ray</topic></variant><variant type="other"><topic>micro XRF</topic></variant><variant type="other"><topic>micro x-ray fluorescence spectroscopy</topic></variant><variant type="other"><topic>micro-XRF</topic></variant><variant type="other"><topic>micro-XRF spectroscopy</topic></variant><variant type="other"><topic>spectroscopy, micro x-ray fluorescence</topic></variant> <note xml:lang="en"><![CDATA[ A technique in which localized regions of a sample are examined with spatial resolution on the micrometer scale. ]]></note></mads>