<?xml version="1.0" encoding="utf-8"?><mads xmlns="http://www.loc.gov/mads/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/mads/
mads.xsd"><authority><topic authority="http://AATesaurus.cultura.gencat.cat/aat/getty_en">confocal micro x-ray fluorescence</topic></authority><related type="broader"><topic>spectroscopy</topic></related><variant type="other"><topic>CXRF</topic></variant><variant type="other"><topic>confocal XRF</topic></variant><variant type="other"><topic>confocal micro-XRF</topic></variant><variant type="other"><topic>confocal x-ray fluorescence</topic></variant> <note xml:lang="en"><![CDATA[ A variant of XRF imaging that is based on the use of two x-ray lenses in a confocal configuration, enabling measurements of high spatial resolution in three directions, including depth (x, y, and z) in the micrometer range. ]]></note></mads>