<?xml version="1.0" encoding="utf-8"?><mads xmlns="http://www.loc.gov/mads/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/mads/
mads.xsd"><authority><topic authority="http://AATesaurus.cultura.gencat.cat/aat/getty_en">ion scattering spectroscopy</topic></authority><related type="broader"><topic>mass spectrometry</topic></related><variant type="other"><topic>ISS</topic></variant><variant type="other"><topic>spectroscopy, ion scattering</topic></variant> <note xml:lang="en"><![CDATA[ A surface analysis technique which measures the elastically scattered ion created when a primary ion beam is directed at the sample surface. The kinetic energy of the reflected primary ion depends on the mass of the surface atom involved in scattering, thus revealing information about the sample surface.    ]]></note></mads>