<?xml version="1.0" encoding="utf-8"?><mads xmlns="http://www.loc.gov/mads/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/mads/
mads.xsd"><authority><topic authority="http://AATesaurus.cultura.gencat.cat/aat/getty_en">micro x-ray diffraction</topic></authority><related type="broader"><topic>x-ray diffraction</topic></related><variant type="other"><topic>x-ray micro-diffraction</topic></variant><variant type="other"><topic>diffraction, micro x-ray</topic></variant><variant type="other"><topic>micro-XRD</topic></variant> <note xml:lang="en"><![CDATA[ X-ray diffraction technique which uses x-ray optics to focus an excitation beam to a small spot on the sample surface so that extremely small features on the sample can be analyzed at much higher resolution than with conventional XRD. ]]></note></mads>