<?xml version="1.0" encoding="utf-8"?><mads xmlns="http://www.loc.gov/mads/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/mads/
mads.xsd"><authority><topic authority="http://AATesaurus.cultura.gencat.cat/aat/getty_en">Auger electron spectroscopy</topic></authority><related type="other"><topic>atomic emission spectroscopy</topic></related><related type="other"><topic>electron energy loss spectroscopy</topic></related><related type="broader"><topic>emission spectroscopy</topic></related><variant type="other"><topic>AES</topic></variant><variant type="other"><topic>SAM</topic></variant><variant type="other"><topic>scanning Auger microscopy</topic></variant><variant type="other"><topic>spectroscopy, Auger electron</topic></variant> <note xml:lang="en"><![CDATA[ Sensitive surface analytical technique that measures secondary electrons excited by an incident electron beam. This technique is used to determine elemental composition of the top few nanometers of solid, electrically conductive materials. ]]></note></mads>