<?xml version="1.0" encoding="utf-8"?><!DOCTYPE Zthes SYSTEM "http://zthes.z3950.org/xml/zthes-05.dtd">  <Zthes><term><termId>31358275</termId><termName>microsensors</termName><termType>PT</termType><termNote><![CDATA[ Any miniaturized probe with physical dimensions in the submicrometer to millimeter range. Microsensors are manufactured using microelectromechanical systems (MEMS) technology. ]]></termNote><termCreatedDate>2026-03-30 20:36:38</termCreatedDate><relation><relationType>UF</relationType><termId>31358276</termId><termName>micro-sensor</termName><termType>ND</termType></relation><relation><relationType>UF</relationType><termId>31358277</termId><termName>microsensor</termName><termType>ND</termType></relation><relation><relationType>BT</relationType><termId>31325894</termId><termName>sensors</termName><termType>PT</termType></relation></term>  </Zthes>