Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. measuring

Anotations

Scope note:

A nondestructive, noninvasive optical technique used to test the dielectric properties of thin films. Spectroscopic ellipsometry (SE) employs broadband light sources to measure refractive index, absorption coefficient, and film thickness from the polarization characteristics of linearly polarized incident light reflected from the sample's surface.