Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. spectroscopy

Anotations

Scope note:

A variant of XRF imaging that is based on the use of two x-ray lenses in a confocal configuration, enabling measurements of high spatial resolution in three directions, including depth (x, y, and z) in the micrometer range.