Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. mass spectrometry

Anotations

Scope note:

A form of mass spectrometry commonly used for surface analysis. When a primary beam of accelerated ions strikes a solid surface, secondary ions are among the elements displaced in a process called sputtering. These ions may be directly studied to gain information about the target material.