Hierarchy classification:

1. top of the aat hierarchies
2. Activities Facet
3. Processes and Techniques (hierarchy name)
4. [processes and techniques by specific type]
5. analysis and testing techniques
6. mass spectrometry

Anotations

Scope note:

Technique closely related to secondary ion mass spectroscopy (SIMS), varying from it only in the strict separation between emission and ionization of the sputtered particles from the sample surface. Neutral atoms are detected by post-ionising any atoms that are ejected from the surface. This post-ionisation can be accomplished by using lasers or electron bombardment of the atoms entering the mass analyser.