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PECVD

PECVD

PECVD USE plasma-enhanced chemical vapor deposition

Date of creation: 02-Mar-2026

Accepted term: 02-Mar-2026

BS8723-5
DC
MADS
SKOS-Core
VDEX
XTM
Zthes

0-9 $'(.A B C D E F G H I J K L M N O P Q R S T U V W X Y Z ¥Ð ǀ ǁ ǃ ʻ ̔Β Δ Μ Τ К Я ה प 宋平招曹栓熔獵祖简羅耐芯螭軒重铸

URI: http://AATesaurus.cultura.gencat.cat/aat/getty_en

Author: Getty Institute

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