microsensors

  1. Home
  2. top of the aat hierarchies
  3. Objects Facet
  4. Furnishings and Equipment (hierarchy name)
  5. Measuring Devices (hierarchy name)
  6. measuring devices (instruments)
  7. [measuring devices for extent]
  8. sensors
  9. microsensors
Scope note
Any miniaturized probe with physical dimensions in the submicrometer to millimeter range. Microsensors are manufactured using microelectromechanical systems (MEMS) technology.
microsensors
Accepted term: 09-Mar-2026